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With wireless sensor wafers and an automation package,.

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Websensarray automation provides productivity enhancements resulting from gains in process tool availability, more efficient use of engineering resources and centralized data storage.

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Webkla's sensarray ® products enable in situ monitoring of process tools' environments and wafer handling conditions.

Webkla's sensarray ® products enable in situ monitoring of process tools' environments and wafer handling conditions.

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